Statistical performance evaluation of electrostatic micro actuators for a deformable mirror

This paper describes a study to characterize the performance of surface micromachined electrostatic actuators, with a brief introduction to some MEMS (microelectromechanical systems) mirrors developed at BU incorporating these actuators. Fixed-fixed actuators were extensively tested to determine suitability for optical applications, and specffically for an adaptive optics imagining system. The critical issues relating to device performance, namely yield (indicating robustness and process reliability), position repeatability, precision and frequency response, were quantified in the research effort described here. The study demonstrated 95% device yield, 10 nm position repeatability (99% confidence levels), and greater than 66 kHz frequency bandwidth.